Publication Date:
2010
Short description:
Deep X-ray Lithography for Direct Patterning of PECVD Films / Costacurta, S., Malfatti, L., Patelli, A., Falcaro, P., Amenitsch, H., Marmiroli, B., Grenci, G., Picinini, M., Innocenzi, P.. - In: PLASMA PROCESSES AND POLYMERS. - ISSN 1612-8850. - 7:(2010), pp. 459-465. [10.1002/ppap.200900147]
Iris type:
1.1 Articolo in rivista
List of contributors:
Costacurta, S; Malfatti, Luca; Patelli, A; Falcaro, P; Amenitsch, H; Marmiroli, B; Grenci, G; Picinini, M; Innocenzi, Plinio
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