7 years of X-Ray fluorescence computed micro-tomography

Since 1998 we have developed X-Ray fluorescence tomography for microanalysis. All aspects were tackled starting with the reconstruction performed by FBP or ART methods. Self-absorption corrections were added and combined with Compton, transmission and fluorescence tomographies to obtain fully quantitative results. Automatic "smart scans" minimized overhead time scanning/aligning non-cylindrical objects. The scans were performed step-by-step or continuously with no overhead time. Focusing went from 5 to 1 micron range, using FZP or CRL lenses, and finally KB bent mirrors which yield sub-micron high intensity beams.Recently, we have performed the first quantitative 3D fluo-tomography by helical scanning. We are now studying energy dependent fluo-tomography for chemically-sensitive imaging of the internal structure of samples.This chronology yielded the present level of sophistication for both experiments and data treatment and finally a method ready for wide dissemination among scientists.